Titanium nitride films for ultrasensitive microresonator detectors

Development of Ultrasensitive Photon Detectors and Microwave Amplifiers Using Superconducting Nitride Thin Films

This is the final technical report for the KISS Technical Development program entitled “Development of Ultrasensitive Photon Detectors and Microwave Amplifiers Using Superconducting Nitride Thin Films”. The Technical Development phase started in January 2011 and concluded in December 2012. The overall goal of this program was to explore the application of high-resistivity superconductors, parti...

Superconducting Microresonator Detectors

Figure 1: Left: Principle of operation of superconducting microresonator detectors, following[1]. The absorbed photon energy breaks Cooper electron pairs in a thin superconducting film (a) which is part of a lithographed microresonator circuit (b). The breaking of Cooper pairs causes a change in the surface reactance and resistance of the film, leading to a shift in the resonance frequency fr a...

Operation of a titanium nitride superconducting microresonator detector in the nonlinear regime

in the nonlinear regime L. J. Swenson, P. K. Day, B. H. Eom, H. G. Leduc, N. Llombart, C. M. McKenney, O. Noroozian, and J. Zmuidzinas Division of Physics, Mathematics, and Astronomy, California Institute of Technology, Pasadena, California 91125, USA Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109, USA Delft University of Technology, 2628 CD Delft, The...

Substrate Effects on the APCVD Growth of Titanium Nitride Films

Titanium Nitride Thin Films by the Electron Shower Process

Titanium nitride (TiN), a stable compound with the NaCl structure, has a wide range of properties which find applications in cutting tools, wear resistant parts, semiconductor metallization, and the jewelry industry. However, there are problems with preparing highly adhesive thin films which maintain good properties. Thin films of titanium nitride have been prepared by the Electron Shower (ES) ...